Transparent polycrystalline TiO₂ thin films have been deposited on unheated glass substrates using RF reactive magnetron sputtering. Depositions were carried out at different glancing angles and with different total gas mixture pressures. The variation of these parameters affected the crystal phase composition and the surface morphology. Depending on the glancing angle and the pressure, rutile, mixed anatase/ rutile and pure anatase were deposited at low substrate temperature. Both hydrophilic and hydrophobic TiO₂ were obtained, exhibiting fast photoconversion to superhydrophilic upon UV irradiation. The effect of the materials physicochemical properties on the wettability and rate of the UV induced superhydrophilicity is evaluated.

中文翻译：

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透明锐钛矿/金红石混合相掠角磁控溅射纳米TiO2薄膜的润湿性能。

透明多晶TiO ₂薄膜已使用RF反应磁控溅射法沉积在未加热的玻璃基板上。沉积是在不同的掠射角和不同的总气体混合物压力下进行的。这些参数的变化影响了晶相组成和表面形态。根据掠射角度和压力，在低底物温度下沉积金红石，锐钛矿/金红石混合和纯锐钛矿。获得了亲水性和疏水性的TiO _2，它们在UV照射下表现出快速的光转化为超亲水性。评估了材料理化性质对润湿性和紫外线诱导的超亲水性速率的影响。