X‐ray photoelectron spectroscopy spectra of chromium monosilicide (CrSi) and disilicide (CrSi₂) were collected from a clean surface prepared by fracturing the bulk silicide compound in a spectrometer under ultrahigh vacuum; the analytical procedure for the phase identification of the Cr–Si system was examined. A negligible binding energy shift was observed in the Cr 2p_3/2 level between elemental Cr and CrSi₂, whereas the energy of CrSi was 0.2 eV lower than that of Cr and CrSi₂. The satellite peak in the Cr 2p spectra originating from the plasmon‐loss phenomena was found only for CrSi and CrSi₂. The binding energy of Si 2p shifted, reflecting the silicide phases; the energy of CrSi₂ and CrSi was 0.3 eV higher and lower, respectively, than that of elemental Si. Although a slight difference in the spectral shape was observed in the valence band region, the phase identification was considered unreliable. However, the energy shifts of Si 2p and the presence of the plasmon‐loss peak in the Cr 2p spectra provide important insights into the phase identification of the Cr–Si system.

中文翻译：

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原位断裂清洁表面获得的单硅化铬和二硅化铬的XPS光谱

单硅化铬（CrSi）和二硅化铬（CrSi ₂）的X射线光电子能谱是从干净的表面收集的，该表面是通过在超高真空下将大量的硅化物化合物在分光计中破碎而制备的；检验了Cr-Si系统相识别的分析程序。在元素Cr和CrSi ₂之间的Cr 2p _3/2能级中观察到结合能的变化可忽略不计，而CrSi的能量比Cr和CrSi ₂的能低0.2 eV 。在Cr 2p光谱中，仅从CrSi和CrSi ₂发现了源自等离振子损耗现象的卫星峰。Si 2p的结合能发生变化，反映出硅化物相。CrSi ₂的能量CrSi比元素Si分别高0.3 eV和低0.3 eV。尽管在价带区域观察到光谱形状略有差异，但相位识别被认为是不可靠的。但是，Si 2p的能量转移和Cr 2p光谱中的等离激元损耗峰的存在为Cr-Si系统的相识别提供了重要的见识。