Abstract

Floating potential fluctuations (FPF) of the direct current magnetron sputtering plasma as a function of discharge voltage were observed. The system behaves chaotic to quasi periodic transition as the discharge voltage is increased. Detailed quantify examination is carried out using time series analyzing techniques such as Lyapunov exponent and statistical estimation to explore the dynamics of the system. Visual information of FPF has been observed using recurrence plot (RP). Further, quantification and visual nationalization of the FPF is corroborated by 0-1 results.

中文翻译：

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直流磁控溅射等离子体中浮动电位波动从混沌到准周期性过渡的0-1测试和递推分析

摘要

观察到直流磁控溅射等离子体的浮动电势波动（FPF）与放电电压的关系。随着放电电压的增加，系统表现出从混沌到准周期性的过渡。使用时间序列分析技术（例如Lyapunov指数和统计估计）进行详细的量化检查，以探索系统的动态。使用重复图（RP）可以观察到FPF的视觉信息。此外，0-1结果证实了FPF的量化和可视化。