Abstract Interferential optical encoders are promising nano-positioning sensors in precision manufacturing and metrology instrumentation. As measuring standard, the quality of diffraction grating scales primarily determines the performance of the interferential optical encoders. In this work, the optimal design and fabrication of a reflective diffraction grating scale with sine-trapezoidal groove is performed. Firstly, the requirement for diffraction characteristics of diffraction grating scales is specified by introducing the basic principle of interferential optical encoders. Sequentially, the critical requirements of the diffraction grating scales are further specified by theoretically investigating the influence of groove-profile parameters (i.e. line height, groove and ridge widths) and micro-defect parameters (i.e. surface roughness and line roughness) on the diffraction characteristics of diffraction grating scales. Finally, morphological parameter optimization of a diffraction grating scale with a pitch of 4 μm is performed, and the diffraction grating scale is fabricated and characterized. The characterization results indicate that the fabricated diffraction grating scale conforms well to the optimal design, and is ideal for application in interferential optical encoders.

中文翻译：

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带正弦梯形槽的干涉型光学编码器反射型光栅尺的优化设计

摘要 干涉式光学编码器是精密制造和计量仪器中很有前途的纳米定位传感器。作为衡量标准，衍射光栅尺的质量主要决定了干涉式光学编码器的性能。在这项工作中，进行了具有正弦梯形凹槽的反射式衍射光栅尺的优化设计和制造。首先，通过介绍干涉式光学编码器的基本原理，明确了衍射光栅尺的衍射特性要求。随后，通过从理论上研究凹槽轮廓参数（即线高、凹槽和脊宽度）和微缺陷参数（即 表面粗糙度和线粗糙度）对衍射光栅尺的衍射特性的影响。最后，对节距为4 μm的衍射光栅尺进行形态参数优化，制作并表征了衍射光栅尺。表征结果表明，所制造的衍射光栅尺符合优化设计，是干涉光学编码器应用的理想选择。