An improved diffusion based model for prediction of the hydrogen content in co-deposited layers depending on the deposition conditions (the properties of the material which is co-deposited with hydrogen, rate of deposition, hydrogen flux and particle energy, substrate temperature) is presented. The model is validated using experimental data for W, Mo and Al, and is compared to empirical scaling equations currently in use. It is shown that a good agreement is observed in regards to hydrogen content vs substrate temperature experimental data, and no disagreement with scaling equations can be seen in regards to the role of hydrogen flux and the rate of deposition. It is shown that the influence of hydrogen particle energy on the hydrogen content requires further investigation. In addition to hydrogen, models for other mobile impurities both in co-deposited layers and in layers under steady-state net erosion conditions are given.

提出了一种改进的基于扩散的模型，该模型可根据沉积条件（与氢共沉积的材料的性质，沉积速率，氢通量和颗粒能，衬底温度）来预测共沉积层中的氢含量。使用W，Mo和Al的实验数据验证了该模型，并将其与当前使用的经验比例方程进行了比较。结果表明，在氢含量与衬底温度的实验数据方面，观察到了很好的一致性，在氢通量的作用和沉积速率方面，没有发现与比例方程式存在分歧。结果表明，氢粒子能量对氢含量的影响尚待进一步研究。除了氢