Abstract A series of permalloy nanofilms on glass substrates was fabricated by use of magnetron sputtering. As-deposited and thermally annealed in air oxidized nanofilms were characterized by the AFM and VSM techniques. For a temperature range of 300–475 °C, the magneto-optical figure of merit (FOM) altered in magnitude due to rise in transparency and strong change in the Faraday rotation of the oxidized nanofilms. In the near infrared range, FOM of the 425 °C-oxidized nanofilms was more than one order of magnitude larger than that of the as-deposited ones. The observed magneto-optical properties were addressed to material and structural transformations of the as-deposited nanofilms.

中文翻译：

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坡莫合金纳米薄膜氧化后磁光品质因数的变化

摘要 采用磁控溅射技术在玻璃基板上制备了一系列坡莫合金纳米薄膜。空气氧化纳米膜中的沉积和热退火通过 AFM 和 VSM 技术进行表征。在 300-475 °C 的温度范围内，由于氧化纳米膜的透明度增加和法拉第旋转的强烈变化，磁光品质因数 (FOM) 的大小发生了变化。在近红外范围内，425 °C 氧化的纳米膜的 FOM 比沉积的 FOM 大一个数量级以上。观察到的磁光特性与沉积的纳米膜的材料和结构转变有关。