Abstract Liquid and solid states on-chip micro-supercapacitors based on polyaniline (PANI) coated on graphene nanowalls which grown on silicon nanowires were reported in this work. Novel micro-fabrication technologies were investigated to create three dimension (3D) hierarchical electrodes. High aspect ratio silicon nanowires were produced by metal-assisted chemical etching (MACE). 3D hierarchical graphene nanowalls were grown on silicon nanowire surface by a microwave plasma-enhanced chemical vapor deposition (PECVD). Graphene nanowalls were subsequently coated by conductive PANI. Both of liquid and solid state micro-supercapacitors were successfully fabricated with symmetric face to face high density nanowire arrays separated by liquid and gel electrolytes, respectively. The areal energy and power density of the liquid-state on-chip micro-supercapacitor are 11.7 μWh/cm2 and 0.42 mW/cm2, respectively, while those of the solid-state on-chip micro-supercapacitor are 10.8 μWh/cm2 and 0.78 mW/cm2.

中文翻译：

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使用基于微加工技术的硅纳米线-石墨烯纳米球-PANI电极的液态和固态片上微型超级电容器

摘要 这项工作报道了基于聚苯胺 (PANI) 的液态和固态片上微型超级电容器涂覆在石墨烯纳米壁上，石墨烯纳米壁生长在硅纳米线上。研究了新型微制造技术以创建三维 (3D) 分层电极。高纵横比硅纳米线是通过金属辅助化学蚀刻 (MACE) 生产的。通过微波等离子体增强化学气相沉积 (PECVD) 在硅纳米线表面上生长 3D 分层石墨烯纳米壁。石墨烯纳米壁随后被导电聚苯胺涂覆。液态和固态微型超级电容器均成功地制成了对称的面对面高密度纳米线阵列，分别由液态和凝胶电解质隔开。