Large area uniform plasma sources, such as high-density magnetized inductively coupled plasma (ICP) and helicon plasma, have broad applications in industry. A comprehensive comparison of ICP and helicon plasma, excited by a single-loop antenna, is presented in this paper from the perspectives of mode transition, hysteresis behavior, and density distribution. The E-H mode transition in ICP and the E-H-W mode transition in helicon plasma are clearly observed in the experiments. Besides, the considerable variation of hysteresis behavior from inverse hysteresis to normal hysteresis by the influence of the magnetic field is explored. The bi-Maxwellian and Maxwellian electron energy distribution functions in each discharge are used to explain this phenomenon, which is essentially related to the transition from a nonlocal kinetic property to a local kinetic property of electrons. In addition, we notice that the plasma density, in the radial direction, is peaked in the center of the tub...

中文翻译：

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单环天线中的电感耦合等离子体（ICP）和螺旋等离子体的特性

大面积均匀等离子体源，例如高密度磁化电感耦合等离子体（ICP）和螺旋等离子体，在工业上具有广泛的应用。本文从模式转换，磁滞行为和密度分布的角度，对由单环天线激发的ICP和螺旋等离子体进行了全面的比较。在实验中清楚地观察到ICP中的EH模式转变和螺旋等离子体中的EHW模式转变。此外，还研究了由于磁场的影响，磁滞行为从反磁滞到正常磁滞的显着变化。每个放电中的双麦克斯韦和麦克斯韦电子能量分布函数可用来解释这种现象，这基本上与电子从非局部动力学性质到局部动力学性质的转变有关。此外，我们注意到，等离子体密度沿径向在桶的中心达到峰值。