A high‐precision XYZ translator was developed for the microanalysis of electronic structures and chemical compositions on material surfaces by electron spectroscopy techniques, such as photoelectron spectroscopy and absorption spectroscopy, utilizing the vacuum ultraviolet and soft X‐ray synchrotron radiation at an undulator beamline BL‐13B at the Photon Factory. Using the high‐precision translator, the profile and size of the undulator beam were estimated. They were found to strongly depend on the photon energy but were less affected by the polarization direction. To demonstrate the microscopic measurement capability of an experimental apparatus incorporating a high‐precision XYZ translator, the homogeneities of an SnO film and a naturally grown anatase TiO₂ single crystal were investigated using X‐ray absorption and photoemission spectroscopies. The upgraded system can be used for elemental analyses and electronic structure studies at a spatial resolution in the order of the beam size.

中文翻译：

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在光子工厂开发高精度XYZ转换器并估算真空紫外和软X射线波动器光束线BL-13B的光束轮廓

开发了一种高精度XYZ转换器，用于通过电子光谱技术对材料表面上的电子结构和化学成分进行微分析，例如光电子能谱和吸收能谱，利用波荡器光束线BL-上的真空紫外和软X射线同步加速器辐射进行分析。光子工厂的13B。使用高精度转换器，可以估算出波荡器光束的轮廓和大小。发现它们强烈依赖于光子能量，但受偏振方向的影响较小。为了演示装有高精度XYZ平移仪的实验设备的显微测量能力，SnO膜和自然生长的锐钛矿TiO ₂的均质性使用X射线吸收和光发射光谱学研究了单晶。升级后的系统可以按光束大小顺序以空间分辨率用于元素分析和电子结构研究。