Tunable/reconfigurable metasurfaces that can actively control electromagnetic waves upon external stimuli are of great importance for practical applications of metasurfaces. Here, we demonstrate a reconfigurable nano-kirigami metasurface driven by pneumatic pressure operating in the near-infrared wavelength region. The metasurfaces consist of combined Archimedean spirals and are fabricated in a free-standing gold/silicon nitride nanofilm by employing focused ion beam (FIB) lithography. The deformable spirals are instantly transformed from two dimensional (2D) to three-dimensional (3D) by the FIB-based nano-kirigami process. The 2D–to–3D transformation induces a dramatic irreversible change of the plasmonic quadruple modes and results in significant modulation in reflection by 137%. The suspended porous nano-kirigami metasurface is further integrated with an optofluidics device, with which the optical resonance is reversibly modulated by the pneumatic pressure. This work provides a strategy for tunable/reconfigurable metasurfaces, which are useful to build a promising lab-on-a-chip platform for microfluidics, biological diagnostics, chemical sensing, and pressure monitoring.

中文翻译：

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通过气压可重构纳米剪纸超表面

可以根据外部刺激主动控制电磁波的可调谐/可重构超表面对于超表面的实际应用非常重要。在这里，我们展示了一个可重构的纳米剪纸超表面，由在近红外波长区域运行的气压驱动。超表面由组合的阿基米德螺旋组成，并通过使用聚焦离子束 (FIB) 光刻在独立的金/氮化硅纳米膜中制造。通过基于 FIB 的纳米剪纸工艺，可变形螺旋立即从二维 (2D) 转换为三维 (3D)。2D 到 3D 转换引起等离子体四重模式的显着不可逆变化，并导致反射显着调制 137%。悬浮的多孔纳米剪纸超表面进一步与光流体装置集成，通过气动压力可逆地调节光学共振。这项工作为可调谐/可重构超表面提供了一种策略，这有助于为微流体、生物诊断、化学传感和压力监测构建一个有前途的芯片实验室平台。