Abstract The nitrogen-doped hydrogenated diamond like coatings (a-C:H:N) with 0–3 at.% nitrogen content were deposited onto 316 L steel substrate by PECVD. The x-ray photoelectron spectroscope, Raman spectroscopy, and Fourier transformation infrared spectroscopy are used to study their bonding structure evolution during annealing. Effect of annealing on their hardness and residual stress is also evaluated by nano indenter and film stress instrument. It shows that the sp3 fraction in a-C:H:N coatings contains lot of Nsp3 and reaches the maximum around 0.12 at.% N content. The a-C:H:N coating with 2.95 at.% N can keep high sp3 fraction and high hardness 12.4 GPa even after annealed at 590 °C.

中文翻译：

---

氮掺杂对氢化非晶金刚石涂层热稳定性的影响

摘要 通过 PECVD 在 316 L 钢基材上沉积氮含量为 0-3 at.% 的氮掺杂类氢化金刚石涂层 (aC:H:N)。X 射线光电子能谱仪、拉曼光谱和傅立叶变换红外光谱用于研究它们在退火过程中的键合结构演变。退火对其硬度和残余应力的影响也通过纳米压头和薄膜应力仪进行评估。它表明 aC:H:N 涂层中的 sp3 分数包含大量 Nsp3，并在 0.12 at.% N 含量附近达到最大值。含 2.95 at.% N 的 aC:H:N 涂层即使在 590 °C 退火后仍能保持高 sp3 分数和 12.4 GPa 的高硬度。