Abstract

The process of deposition of allotropic modifications of carbon from the gas phase (5 vol % methane) with the use of microwave plasma on W wire 20 μm thick has been studied. The microwave power was changed in the range from 3 to 5 kW. The investigations of the structure of coatings, as well as the results of Raman spectroscopy, made it possible to establish that a microwave power of 3 kW results in the deposition of a diamond film with a crystallite size from 1 to 5 μm, microwave power of 4 kW causes the deposition of diamond-like carbon, and an increase in power up to 5 kW leads to the deposition of multigraphene film.

中文翻译：

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微波等离子体在钨丝上气相生长碳的同素异形改性

摘要

研究了利用微波等离子体在20μm厚的W线上从气相沉积碳的同素异形改性过程（5％体积％的甲烷）。微波功率在3至5 kW的范围内变化。通过对涂层结构的研究以及拉曼光谱的结果，可以确定3 kW的微波功率导致沉积了微晶尺寸为1至5μm的金刚石膜，而微波功率为4 kW会引起类金刚石碳的沉积，功率增加到5 kW会导致聚石墨烯膜的沉积。