The lateral resolution of an X-ray photoelectron spectroscopy instrument, which is equipped with a focused X-ray beam, is limited by the nominal X-ray beam diameter and the long tail intensity distri-bution of the X-ray beam. The long tail intensity distribution of the X-ray beam impedes to perform a measurement with good lateral resolution and low detection limits at the same time. Two experimental setups are described which allow examining sample structures that are smaller than the X-ray beam dimensions. The first method uses differential sample charging on partly non-conductive samples by low energy electron flooding. The spectra of the non-conductive sample areas are shifted towards lower binding energy. That way, the surface compositions of conductive and non-conductive sample areas are estimated independently. The second method utilizes the rather limited dimensions of the energy analyser acceptance volume. Here only the sample is placed inside the energy analyser acceptance volume. That way, signals from the illuminated sample contribute exclusively to the measured photoelectrons intensity, independent form the sample size.

中文翻译：

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超出仪器横向分辨率限制的 XPS 测量实验设置

配备聚焦 X 射线束的 X 射线光电子能谱仪的横向分辨率受标称 X 射线束直径和 X 射线束长尾强度分布的限制。X 射线束的长尾强度分布阻碍了同时具有良好横向分辨率和低检测限的测量。描述了两个实验设置，它们允许检查小于 X 射线束尺寸的样品结构。第一种方法通过低能电子淹没在部分非导电样品上使用差分样品充电。非导电样品区域的光谱向较低的结合能移动。这样，导电和非导电样品区域的表面成分是独立估计的。第二种方法利用能量分析仪接受体积的相当有限的尺寸。这里只有样品被放置在能量分析仪的接受体积内。这样，来自受照样品的信号仅对测量的光电子强度有贡献，与样品大小无关。