Abstract Diffraction imposes a barrier to resolve objects smaller than half the wavelength used to illuminate them. In optical microscopy, this barrier was surpassed 25 years ago. One form of achieving super-resolution is the use of complex-amplitude pupil masks. Spatial light modulators can be used to produce these masks, if we compensate the aberrations introduced by them. In this paper we propose a method to encode a complex-amplitude pupil mask in a phase-only spatial light modulator of the Liquid Crystal on Silicon (LCoS) variety. We describe the form in which the pupil mask is encoded in a phase grating generated with an LCoS spatial light modulator, and how the aberrations introduced by this device can also be compensated with this grating. We present numerical and experimental results that validate the method.

中文翻译：

---

具有复振幅光瞳掩模的超分辨率以相位光栅的第一衍射级编码

摘要 衍射对分辨小于用于照亮它们的波长一半的物体施加了障碍。在光学显微镜中，这一障碍早在 25 年前就已被超越。实现超分辨率的一种形式是使用复振幅瞳孔掩模。如果我们补偿由它们引入的像差，则可以使用空间光调制器来产生这些掩模。在本文中，我们提出了一种在硅基液晶 (LCoS) 品种的仅相位空间光调制器中对复振幅光瞳掩模进行编码的方法。我们描述了光瞳掩模在由 LCoS 空间光调制器生成的相位光栅中编码的形式，以及该设备引入的像差如何也可以通过该光栅进行补偿。我们提出了验证该方法的数值和实验结果。