Abstract

The influence of operating modes on the response of ammonia sensors based on tin dioxide films has been studied. Samples have been obtained as a result of high-frequency magnetron sputtering of a SnO₂:Sb target on sapphire substrates with predeposited Pt electrodes and a heater. Varying the heating cycle duration and reducing the cooling cycle temperature may increase the response by one or two orders of magnitude. The results are explained as being due to the change in the density of chemically adsorbed oxygen on the surface of the SnO₂:Sb film depending on the temperature regime.

中文翻译：

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工作模式对基于二氧化锡薄膜的氨传感器响应的影响

摘要

研究了工作模式对基于二氧化锡薄膜的氨传感器响应的影响。通过在具有预沉积Pt电极和加热器的蓝宝石衬底上进行SnO ₂：Sb靶的高频磁控溅射，获得了样品。改变加热周期的持续时间并降低冷却周期的温度可能会使响应增加一两个数量级。结果被解释为归因于SnO ₂：Sb膜表面上化学吸附的氧的密度根据温度范围的变化。