Abstract A miniaturized inline Fabry-Perot interferometer fabricated by fs laser direct writing in the water has been proposed. The performances of the Fabry-Perot interferometers fabricated in the deionized water and air have been investigated and the experimental results demonstrate that the sensor made in the water has better performance. The influence of the cavity length on the sensitivity is discussed as the temperature increases from 50 °C to 500 °C. The sensor fabricated in the water can be used as a high-temperature sensor in harsh environments due to its miniaturized size, high linearity, good repeatability and perfect mechanical property.

中文翻译：

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水辅助飞秒激光器制作的高温光纤传感器

摘要 提出了一种采用飞秒激光在水中直写制作的小型化在线法布里-珀罗干涉仪。研究了在去离子水和空气中制作的法布里-珀罗干涉仪的性能，实验结果表明在水中制作的传感器具有更好的性能。随着温度从 50 °C 增加到 500 °C，讨论腔长度对灵敏度的影响。在水中制作的传感器由于其体积小、线性度高、重复性好、机械性能优良，可用作恶劣环境下的高温传感器。