Abstract The liquid-solid conjugate heat transfer in three-dimensional diamond microgrooves with different cross-section shapes was numerical analyzed by COMSOL, and the results show that rectangular microgrooves have better heat transfer characteristics than triangular and trapezoidal microgrooves. The laser processing experiments of CVD diamond were carried out by using 1030 nm wavelength high repetition frequency femtosecond laser processing system equipped with 2D scanning galvanometer and XYZ stage. By studying the influence of laser power, scanning speed, repeated scanning times and defocusing distance on the size of the microgroove, the appropriate process parameters were obtained. On this basis, the spiral path scanning process with different intervals was designed to adjust the laser intensity absorbed by the side wall and the middle of the microgroove. The diamond microgrooves with nearly rectangular cross section can be machined by using the improved process. This paper provides theoretical and experimental basis for the design and fabrication of diamond microgrooves.

中文翻译：

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飞秒激光加工金刚石矩形微槽的理论与实验研究

摘要 利用COMSOL对不同截面形状的三维金刚石微槽中的液固共轭传热进行了数值分析，结果表明矩形微槽比三角形和梯形微槽具有更好的传热特性。采用配备二维扫描振镜和XYZ平台的1030 nm波长高重复频率飞秒激光加工系统进行了CVD金刚石的激光加工实验。通过研究激光功率、扫描速度、重复扫描次数和散焦距离对微槽尺寸的影响，得到合适的工艺参数。以这个为基础，设计了不同间隔的螺旋路径扫描过程，以调整侧壁和微槽中间吸收的激光强度。改进后的工艺可以加工出截面接近矩形的金刚石微槽。该论文为金刚石微槽的设计与制作提供了理论和实验依据。