Cylindrical Line-Feeding Growth of Free-Standing Silicon Nanohelices as Elastic Springs and Resonators.,Nano Letters

当前位置： X-MOL 学术 › Nano Lett. › 论文详情

Our official English website, www.x-mol.net, welcomes your feedback! (Note: you will need to create a separate account there.)

Cylindrical Line-Feeding Growth of Free-Standing Silicon Nanohelices as Elastic Springs and Resonators.
Nano Letters ( IF 9.6 ) Pub Date : 2020-06-10 , DOI: 10.1021/acs.nanolett.0c01265
Haiguang Ma ₁ , Rongrong Yuan ₁ , Junzhuan Wang ₁ , Yi Shi ₁ , Jun Xu ₁ , Kunji Chen ₁ , Linwei Yu ₁

Affiliation

Three-dimensional (3D) construction of free-standing silicon (Si) nanohelices has been a formidable challenge for planar lithography and etching technology. We here demonstrate a convenient 3D growth and integration of Si nanohelices (SiNHs) upon bamboolike cylinders with corrugated sidewall grooves, where the indium catalyst droplets grow around the cylinders in a helical fashion, while consuming precoated amorphous Si (a-Si) thin film to produce crystalline Si nanowires on the sidewalls. At the end of each groove cycle, the droplets are enforced to linefeed/switch into the neighbor groove to continue a spiral growth of SiNHs with readily tunable diameter, pitch, aspect-ratio, and chiral/achiral symmetries. In addition, the SiNHs can be reliably released as free-standing units to serve as elastic links, supports and vibrational resonators. These results highlight the unexplored potential of high precision 3D self-assembly growth in constructing a wide range of sophisticated electromechanical, sensor, and optoelectronic functionalities.

中文翻译：

自由站立的硅纳米螺旋作为弹性弹簧和谐振器的圆柱进给生长。

自支撑硅（Si）纳米螺旋的三维（3D）构造对平面光刻和蚀刻技术提出了巨大的挑战。我们在这里展示了在具有波纹状侧壁凹槽的竹状圆柱体上，硅纳米螺旋（SiNHs）的便捷3D生长和集成，其中铟催化剂液滴以螺旋方式在圆柱体周围生长，同时消耗了预涂的非晶硅（a-Si）薄膜在侧壁上产生晶体硅纳米线。在每个凹槽周期的末尾，液滴被强制换行/切换到相邻的凹槽中，从而继续以易于调节的直径，螺距，长宽比和手性/非手性对称性不断生长SiNHs。此外，SiNHs可以作为独立单元可靠地释放，以用作弹性连杆，支撑和振动谐振器。

更新日期：2020-07-08

点击分享查看原文

点击收藏

阅读更多本刊最新论文本刊介绍/投稿指南11