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Sample geometry effect on mechanical property of gold micro-cantilevers by micro-bending test
MRS Communications ( IF 1.8 ) Pub Date : 2020-09-01 , DOI: 10.1557/mrc.2020.38
Kosuke Suzuki , Tso-Fu Mark Chang , Ken Hashigata , Keisuke Asano , Chun-Yi Chen , Takashi Nagoshi , Daisuke Yamane , Hiroyuki Ito , Katsuyuki Machida , Kazuya Masu , Masato Sone

Sample geometry effects on mechanical strengths of gold micro-cantilevers are evaluated by a micro-bending test. Six micro-cantilevers with the same length of 50 μm are prepared, and the width and the thickness are varied to examine individual effects on the yield stress. The yield stress increases from 428 to 519 MPa when the thickness decreases from 11.1 to 6.0 μm. No obvious dependency is observed when varying the width. The results reveal that the thickness and the width each has a different influence on the yield stresses of micro-cantilevers evaluated by the bending test, which is the sample geometry effect.

中文翻译:

微弯曲试验研究样品几何形状对金微悬臂梁力学性能的影响

通过微弯曲试验评估样品几何形状对金微悬臂梁机械强度的影响。制备了 6 个相同长度为 50 μm 的微悬臂梁,并通过改变宽度和厚度来检查个体对屈服应力的影响。当厚度从 11.1 μm 减小到 6.0 μm 时,屈服应力从 428 MPa 增加到 519 MPa。改变宽度时没有观察到明显的依赖性。结果表明,厚度和宽度对弯曲试验评估的微悬臂梁的屈服应力有不同的影响,即样品几何效应。
更新日期:2020-09-01
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