An eccentric reflective optical fiber micro-electro-mechanical system (MEMS) micro-pressure sensor is proposed in this paper. The core part of the sensor consists of a dual fiber collimator (a fiber collimator with two pigtails) in an eccentric position and a sensitive silicon diaphragm. The sensitive silicon diaphragm adopts the BM (beam-membrane) structure with small structural parameters manufactured by MEMS manufacturing technology. Simulation results show that the BM structure has good sensitivity and high natural frequency. Overall structure of the sensor with the measurement range of 0 ∼ 10 kPa is designed. The way of intensity demodulation ensures the performance and stability of the sensor and makes the sensing system easier to process signals. By building a static test platform and conducting experiments, we can conclude that the sensitivity of the sensor is −0.32 dB kPa −1 . Furthermore, the repeatability of the sensor is 1.26%FS (full-scale), the hysteresis o...

中文翻译：

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偏心反射光纤MEMS微压传感器

提出了一种偏心反射光纤微机电系统微压力传感器。传感器的核心部分由位于偏心位置的双光纤准直仪（带有两个尾纤的光纤准直仪）和敏感的硅膜片组成。敏感的硅膜片采用MEMS制造技术制造的结构参数小的BM（梁膜）结构。仿真结果表明，该结构具有良好的灵敏度和较高的固有频率。设计了传感器的整体结构，测量范围为0〜10 kPa。强度解调的方式可确保传感器的性能和稳定性，并使传感系统更易于处理信号。通过构建静态测试平台并进行实验，我们可以得出结论，传感器的灵敏度为-0.32 dB kPa -1。此外，传感器的可重复性为1.26％FS（满量程），磁滞误差为...