Near infrared photopolymer for micro-optics applications,Journal of Polymer Science

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Near infrared photopolymer for micro-optics applications
Journal of Polymer Science ( IF 3.9 ) Pub Date : 2020-06-10 , DOI: 10.1002/pol.20200106
Ihab Dika _{1,

2} , Frédéric Diot _{1,

2} , Véronique Bardinal _{3,

4} , Jean‐Pierre Malval _{1,

2} , Carole Ecoffet _{1,

2} , Aurélien Bruyant ₅ , David Barat _{3,

4} , Benjamin Reig _{3,

4} , Jean‐Baptiste Doucet _{3,

4} , Thierry Camps _{3,

4} , Olivier Soppera _{1,

2}

Affiliation

Near infrared (NIR) activable photopolymers suitable for versatile fabrication of micro-optical elements were developed. The first main objective of this paper is to show that these new photopolymers can be used for microfabrication and investigate the parameters governing the microfabrication process. The impact of photonic, physico-chemical and chemical parameters is discussed. High quality microstructures with a good control over their size and shape are demonstrated. The second main objective is to show practical examples of microlenses and waveguides implemented on single core and multiple core optical fibers, VCSELs, and glass slides are then presented. The NIR photosensitivity of this negative tone photoresists allows using the device source itself as to start the crosslinking process, which constitutes a convenient approach for micro-optics self-positioning on NIR sources and justifies the interest of such NIR photopolymer for the fabrication micro-optical elements and optical interconnects. 2

中文翻译：

用于微光学应用的近红外光聚合物

开发了适用于微光学元件多功能制造的近红外 (NIR) 可活化光聚合物。本文的第一个主要目的是表明这些新型光聚合物可用于微细加工，并研究控制微细加工过程的参数。讨论了光子、物理化学和化学参数的影响。展示了可以很好地控制其尺寸和形状的高质量微结构。第二个主要目标是展示在单芯和多芯光纤、VCSEL 和载玻片上实现的微透镜和波导的实际示例。这种负性光刻胶的 NIR 光敏性允许使用设备源本身来开始交联过程，这构成了在 NIR 源上进行微光学自定位的便捷方法，并证明了这种 NIR 光聚合物对制造微光学元件和光学互连的兴趣。2

更新日期：2020-06-10

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