The feasibility of useing a flexible, printed indium-tin-oxide (ITO) sensor to detect hazardous and noxious substances was investigated. The resistivities of this printed ITO (P-ITO) film and that of a commercial sputtered ITO (S-ITO) film were 35.9 and 1.5 × 10 −4 Ω·cm, respectively. The corresponding grain sizes, a determined via X-ray diffractometry, were 31.7 and 102.6 nm. This difference in grain size between the two films led to a remarkable difference in the respective carrier scattering mechanisms. To evaluate the chemical sensing property of both ITO films, we tested their NH 3 sensing abilities; the printed film exhibited a higher sensitivity and better electrical properties.

中文翻译：

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用于检测有害和有毒物质的印刷氧化铟锡薄膜的电学和化学传感特性

研究了使用柔性印刷氧化铟锡 (ITO) 传感器检测危险和有毒物质的可行性。这种印刷的 ITO (P-ITO) 膜的电阻率和商用溅射 ITO (S-ITO) 膜的电阻率分别为 35.9 和 1.5 × 10 -4 Ω·cm。通过 X 射线衍射测定的相应晶粒尺寸为 31.7 和 102.6 nm。两种薄膜之间晶粒尺寸的这种差异导致各自载流子散射机制的显着差异。为了评估两种 ITO 薄膜的化学传感性能，我们测试了它们的 NH 3 传感能力；印刷的薄膜表现出更高的灵敏度和更好的电性能。