The conversion of vibrations into electrical energy for powering low-power small electronic components has been investigated by researchers from different disciplines in the last decade. Among the possible mechanisms, piezoelectricity has received particular attention. In the field of low frequency cantilever-based vibration energy harvesters, the proof mass is essential in order to reduce the resonance frequency and increase the stress along the beam to increase the output power. In this work, a manufacturing process of a micro generator is proposed to easily modify and increase the dimensions of the cantilever, and thus tune its resonance frequency. The effect of the position of the mass on the performances of this flexible piezoelectric energy harvester is also studied. For a proof mass at 8 cm from clamping, we obtain a resonance frequency of 9.9 Hz, a maximum power of 127 μW against a resonance frequency of 16 Hz and a maximum power of 72 μW with a mass at 4 cm. This shows that the maximum power extracted varies in $\cong 1/f_R$ for a constant acceleration of 1 g (9.81 m/s²), as expected theoretically. These promising results show that the prototype can be considered for a low power application as an energy harvesting-based micro-generator.

在过去的十年中，来自不同学科的研究人员已经研究了将振动转换为电能以为低功率小型电子元件供电的方法。在可能的机制中，压电性已受到特别关注。在基于低频悬臂梁的振动能量收集器领域，检测质量是必不可少的，以便降低共振频率并增加沿梁的应力以增加输出功率。在这项工作中，提出了一种微型发电机的制造过程，以容易地修改和增加悬臂的尺寸，从而调节其共振频率。还研究了质量位置对这种柔性压电能量采集器性能的影响。对于距离夹紧8厘米处的证明质量，我们获得了9.9 Hz的共振频率，相对于16 Hz共振频率的最大功率127μW和质量为4 cm的最大功率72μW。这表明提取的最大功率在$\cong \mathrm{1个}/F_{\mathrm{[R}}$如理论上所预期的，恒定加速度为1 g（9.81 m / s ²）。这些有希望的结果表明，该原型机可以考虑作为基于能量收集的微型发电机用于低功率应用。