Abstract In this paper, the molecular beam epitaxy of InGaN nanocolumns on silicon-based microhole arrays has been investigated experimentally. A low-cost method has been designed, which contains the processes of photolithography and wet etching. Tuning uniform microhole arrays show the ability in modulating the luminescence spectra of InGaN nanocolumns, which could lead to the modulation of tristimulus coordinates and correlated color temperatures. Due to the shadow effect, it is found that the size of microholes and the area of flat Si surface have more obvious effects, while the configuration of microhole arrays has limited effect on the modulation of peak wavelength.

中文翻译：

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基于硅的微孔阵列，用于对分子束外延生长的 InGaN 纳米柱发出的白光进行光谱调谐

摘要 本文对InGaN纳米柱在硅基微孔阵列上的分子束外延进行了实验研究。设计了一种低成本的方法，其中包含光刻和湿蚀刻的过程。调谐均匀微孔阵列显示了调制 InGaN 纳米柱发光光谱的能力，这可能导致三色坐标和相关色温的调制。由于阴影效应，发现微孔的大小和平坦的硅表面面积有更明显的影响，而微孔阵列的配置对峰值波长的调制影响有限。