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Theoretical and Experimental Study and Compensation for Temperature Drifts of Micro Thermal Convective Accelerometer
Journal of Microelectromechanical Systems ( IF 2.5 ) Pub Date : 2020-06-01 , DOI: 10.1109/jmems.2020.2977950
Xiaoyi Wang , Wei Xu , Izhar , Yi-Kuen Lee

We present an ambient temperature compensation method for micro thermal convective accelerometers (MTCA) to improve the performance of temperature drift of sensitivity (TDS) and temperature drift of bias (TDB). Based on the theoretical and experimental analysis, we revealed that the temperature drift of sensitivity (sensitivity attenuation) of the MTCA is not only attributed to the changing properties of the working fluids under varying ambient temperature but also resulting from the redistribution of the temperature field within the enclosing chamber of MTCA. Besides, the temperature drift of bias is analyzed, which is proportional to the changing ambient temperature. By means of the newly proposed one-dimensional (1D) model, the sensitivity attenuation function could be easily predicted without time-consuming experiments. Furthermore, with the characterized linear function of temperature drift of bias, and the digital signal processing (DSP) programming (Arduino Yun), the sensitivity compensation error could be controlled within 4% and the temperature drift of bias could be controlled within ±0.05V (sensitivity: 1.4V/g) based on on-site test results. Above all, it is meaningful that this newly designed MTCA is promising to be implemented to ambient temperature changing the environment for precise detection. [2019-0262]

中文翻译:

微型热对流加速度计温漂的理论与实验研究及补偿

我们提出了一种微热对流加速度计 (MTCA) 的环境温度补偿方法,以提高灵敏度温度漂移 (TDS) 和偏置温度漂移 (TDB) 的性能。基于理论和实验分析,我们发现MTCA的灵敏度温度漂移(灵敏度衰减)不仅归因于环境温度变化下工作流体的特性变化,而且还归因于温度场内温度场的重新分布。 MTCA 的封闭室。此外,还分析了偏置的温度漂移,它与环境温度的变化成正比。通过新提出的一维 (1D) 模型,无需耗时的实验即可轻松预测灵敏度衰减函数。此外,具有偏置温漂特征线性函数,数字信号处理(DSP)编程(Arduino Yun),灵敏度补偿误差可控制在4%以内,偏置温漂可控制在±0.05V(灵敏度: 1.4V/g) 基于现场测试结果。最重要的是,这种新设计的 MTCA 有望应用于改变环境温度的环境以进行精确检测。[2019-0262] 有意义的是,这种新设计的 MTCA 有望应用于改变环境温度的环境进行精确检测。[2019-0262] 有意义的是,这种新设计的 MTCA 有望应用于改变环境温度的环境进行精确检测。[2019-0262]
更新日期:2020-06-01
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