Recent studies have elucidated a promising balance of physical and mechanical properties of sputter deposited nickel-molybdenum-tungsten (Ni-Mo-W) films that have a unique nanotwinned microstructure and promising potential for use in high temperature microelectromechanical systems (MEMS). The current study was undertaken to establish the feasibility of making nanotwinned Ni-Mo-W microcantilevers with standard microfabrication processing, to assess their dimensional stability, and to demonstrate the possibility of using nanotwinned Ni-Mo-W in metal MEMS devices. Deposition of Ni-Mo-W films in commercial sputtering chambers revealed a wide processing window for the formation of the requisite nanotwinned microstructure. Conventional photolithography and etchants were employed to shape blanket Ni-Mo-W films into freestanding microcantilever beams. Monitoring microcantilever deflections via interferometry provided a direct measure of residual stresses and overall dimensional stability. Heat treatments of 200°C and 400°C were used to mimic wafer bonding temperatures. At 400°C, microcantilevers exhibited modest stress relaxation, yielding beam deflection profiles on the nanometer scale and portending dimensional stability and control for future metal MEMS devices.

中文翻译：

---

具有高尺寸稳定性的独立式金属镍钼钨微悬臂梁的制造

最近的研究阐明了溅射沉积的镍钼钨 (Ni-Mo-W) 薄膜的物理和机械性能的有希望的平衡，该薄膜具有独特的纳米孪晶微结构和在高温微机电系统 (MEMS) 中的应用潜力。目前的研究旨在确定使用标准微加工工艺制造纳米孪晶 Ni-Mo-W 微悬臂梁的可行性，评估其尺寸稳定性，并证明在金属 MEMS 器件中使用纳米孪晶 Ni-Mo-W 的可能性。在商业溅射室中沉积 Ni-Mo-W 薄膜为形成必要的纳米孪晶微结构提供了一个宽阔的加工窗口。使用传统的光刻和蚀刻剂将覆盖的 Ni-Mo-W 薄膜成形为独立的微悬臂梁。通过干涉测量法监测微悬臂梁挠度提供了残余应力和整体尺寸稳定性的直接测量。使用 200°C 和 400°C 的热处理来模拟晶片键合温度。在 400°C 时，微悬臂梁表现出适度的应力松弛，产生纳米尺度的梁偏转轮廓，预示着未来金属 MEMS 器件的尺寸稳定性和控制。