We present a microelectromechanical system (MEMS)-based closed-loop force sensor, capable of measuring bidirectional forces along one axis of motion. The device comprises an on-chip electrothermal displacement sensor and electrostatic actuators. It features a voltage-controlled stiffness-adjustment mechanism, providing the user with an additional means of tuning the sensor’s characteristics. This silicon-on-insulator device is an improvement on our previous design, offering a better dynamic range and a less complex calibration process. The sensor is fabricated based on a standard SOI MEMS process. It is then fully characterized and instrumented with a feedback controller. The closed-loop characterization reveals a ${1 {\sigma }}$ -resolution of 4.74 nN and a force sensing range of $- {211.7\, {\mu }\text {N}}$ to $\mathrm {211.5\, {\mu }N}$ , leading to a dynamic range of 92.9 dB. [2019-0248]

中文翻译：

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一种高动态范围闭环刚度可调的 MEMS 力传感器

我们提出了一种基于微机电系统 (MEMS) 的闭环力传感器，能够测量沿一个运动轴的双向力。该装置包括片上电热位移传感器和静电致动器。它具有电压控制的刚度调节机制，为用户提供了一种调节传感器特性的额外方法。这种绝缘体上硅器件是对我们之前设计的改进，提供了更好的动态范围和更简单的校准过程。该传感器是基于标准 SOI MEMS 工艺制造的。然后对其进行充分表征并配备反馈控制器。闭环表征揭示了一个 ${1 {\sigma }}$ - 分辨率为 4.74 nN，力感测范围为 $- {211.7\, {\mu }\text {N}}$ 至 $\mathrm {211.5\, {\mu }N}$ ，导致动态范围为 92.9 dB。[2019-0248]