This article reports a novel work on the fabrication of microarrays of electrospun Poly(vinylidene fluoride) (PVDF) membrane for MEMS and energy harvesting applications. Micropatterning of PVDF membrane is an essential step in fabrication process in order for the sample to be integrated in microelectromechanical systems. The high $\beta $ -phase fraction of PVDF membranes was successfully synthesized by one step electrospinning technique. A new fabrication process for micropatterning of electrospun PVDF membrane is being proposed using dry reactive ion etching. Oxygen plasma was chosen as the feeding gas in investigation for high etching rate in PVDF microstructure fabrication process. Micropatterning dimensions of 200/500/ $200~\mu \text{m}$ with the height of over $50~\mu \text{m}$ and etching rate of $2~\mu \text{m}$ /min were achieved in this work. Details of the fabrication process are discussed. High etching rate of patterning process with the selected parameters can be achieved on the electrospun PVDF membranes. This work has demonstrated successful micropatterning and integration of PVDF membrane into MEMS, thus open the possibilities for various application such as for sensors and actuators utilizing polymer membrane. We have validated the capability of the micropatterned device as energy harvester in producing an open circuit voltage density of 1.42 $\text{V}\cdot \text{m}^{{-2}}$ at temperature of 310.15 K and wind speed of 1 $\text{m}\cdot \text{s}^{{-1}}$ . [2019-0180]

中文翻译：

---

电纺 PVDF 膜的微图案化和集成到微器件中

本文报告了一项关于制造用于 MEMS 和能量收集应用的电纺聚偏氟乙烯 (PVDF) 膜微阵列的新工作。PVDF 膜的微图案化是制造过程中必不可少的步骤，以便将样品集成到微机电系统中。高 $\beta $ 通过一步静电纺丝技术成功合成了PVDF膜的-相部分。使用干反应离子蚀刻提出了一种用于电纺 PVDF 膜微图案化的新制造工艺。在研究 PVDF 微结构制造过程中的高蚀刻速率时，选择氧等离子体作为进料气体。微图案尺寸为 200/500/ $200~\mu \text{m}$ 高度超过 $50~\mu \text{m}$ 和蚀刻速率 $2~\mu \text{m}$ /min 在这项工作中取得了成功。讨论了制造过程的细节。可以在电纺 PVDF 膜上实现具有选定参数的图案化工艺的高蚀刻速率。这项工作证明了 PVDF 膜成功的微图案化和集成到 MEMS 中，从而为各种应用打开了可能性，例如利用聚合物膜的传感器和执行器。我们已经验证了微图案设备作为能量收集器的能力，可产生 1.42 的开路电压密度 $\text{V}\cdot \text{m}^{{-2}}$ 温度为 310.15 K，风速为 1 $\text{m}\cdot \text{s}^{{-1}}$ . [2019-0180]