Atomic-resolution cryogenic scanning transmission electron microscopy (cryo-STEM) has provided a path to probing the microscopic nature of select low-temperature phases in quantum materials. Expanding cryo-STEM techniques to broadly tunable temperatures will give access to the rich temperature-dependent phase diagrams of these materials. With existing cryo-holders, however, variations in sample temperature significantly disrupt the thermal equilibrium of the system, resulting in large-scale sample drift. The ability to tune the temperature without negative impact on the overall instrument stability is crucial, particularly for high-resolution experiments. Here, we test a new side-entry continuously variable temperature dual-tilt cryo-holder which integrates liquid nitrogen cooling with a 6-pin micro-electromechanical system (MEMS) sample heater to overcome some of these experimental challenges. We measure consistently low drift rates of 0.3–0.4 Å/s and demonstrate atomic-resolution cryo-STEM imaging across a continuously variable temperature range from ~100 K to well above room temperature. We conduct additional drift stability measurements across several commercial sample stages and discuss implications for further developments of ultra-stable, flexible cryo-stages.

中文翻译：

---

连续可变温度下的原子分辨率 Cryo-STEM

原子分辨率低温扫描透射电子显微镜 (cryo-STEM) 为探索量子材料中选定低温相的微观性质提供了途径。将 cryo-STEM 技术扩展到广泛可调的温度将提供这些材料丰富的温度相关相图。然而，对于现有的低温保持器，样品温度的变化会显着破坏系统的热平衡，从而导致大规模的样品漂移。在不对整体仪器稳定性产生负面影响的情况下调节温度的能力至关重要，特别是对于高分辨率实验。这里，我们测试了一种新的侧入式连续可变温度双倾斜低温支架，它将液氮冷却与 6 针微机电系统 (MEMS) 样品加热器集成在一起，以克服其中一些实验挑战。我们始终测量 0.3–0.4 Å/s 的低漂移率，并在从 ~100 K 到远高于室温的连续可变温度范围内展示原子分辨率的低温 STEM 成像。我们在几个商业样品台上进行了额外的漂移稳定性测量，并讨论了对超稳定、灵活的低温台进一步发展的影响。4 Å/s 并在从 ~100 K 到远高于室温的连续可变温度范围内演示原子分辨率的低温 STEM 成像。我们在几个商业样品台上进行了额外的漂移稳定性测量，并讨论了对超稳定、灵活的低温台进一步发展的影响。4 Å/s 并在从 ~100 K 到远高于室温的连续可变温度范围内演示原子分辨率的低温 STEM 成像。我们在几个商业样品台上进行了额外的漂移稳定性测量，并讨论了对超稳定、灵活的低温台进一步发展的影响。