Abstract

Nonlinear optical microscopy techniques have been used to study thin films of single-phase (perovskite) and two-phase (perovskite–pyrochlore) lead zirconate titanate (PZT) deposited on Pt/TiO₂/SiO₂/Si by means of radio-frequency magnetron sputtering at various target–substrate distances (D = 30–70 mm). Results revealed inhomogeneous distribution of second-harmonic generation in spherulitic perovskite islands, including increased signal intensity at perovskite/pyrochlore interface, which may be related to a nonuniform distribution of mechanical stresses. Factors responsible for the observed strong variation in second-harmonic signal are discussed, including the mutual relationship between changes in the character of spherulitic structure and conditions of PZT film deposition depending on the target–substrate distance.

中文翻译：

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多晶硅锆钛酸铅薄膜的非线性光学诊断

摘要

非线性光学显微镜技术已被用于研究通过射频沉积在Pt / TiO ₂ / SiO ₂ / Si上的单相（钙钛矿）和两相（钙钛矿-烧绿石）锆钛酸铅（PZT）的薄膜。磁控溅射在不同靶材与基材之间的距离（D= 30–70毫米）。结果表明，球形钙钛矿岛中二次谐波的分布不均匀，包括钙钛矿/烧绿石界面处信号强度的增加，这可能与机械应力的不均匀分布有关。讨论了造成所观察到的二次谐波信号强烈变化的因素，包括球状结构特征的变化与PZT薄膜沉积条件之间的相互关系，具体取决于目标-基底的距离。