3D microstructures in pure poly(dimethylsiloxane) (PDMS) and PDMS with embedded Au nanoparticles were prepared by ion beam lithography without any further etching. Two mega‐electron volts helium and 10 MeV oxygen ions were used for ion microstructuring. Parallel lines of 1 mm in length and 10 μm in thickness were fabricated for investigation of the effect of the nanoparticles presence in the polymer on the surface morphology of the created microstructures. The created microstructures were checked by optical microscope. Infrared (IR) spectrometry was used to study the effect of the ions type and fluence on the chemical changes of the material. Atomic force microscopy was used for the fine detail study as well as for checking the microstructure quality. Analysis revealed an increased radiation resistance of the nanocomposite compared to the pure PDMS. Shrinkage is proportional to the fluence, but the maximum value for both materials is limited by saturation. 3D microstructure in modified PDMS obtained at the same irradiation condition as pure PDMS is characterized by its smaller height. Obtaining the microstructure in nanocomposite of the same height as in pure PDMS by increasing the fluence can be impossible due to saturation of shrinkage and/or radiation‐induced heating of the material.

中文翻译：

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PDMS中金纳米粒子的存在对离子束光刻产生的微结构的影响

通过离子束光刻无需任何进一步刻蚀即可制备纯聚二甲基硅氧烷（PDMS）和具有嵌入金纳米粒子的PDMS中的3D微结构。使用两个兆电子伏的氦气和10 MeV的氧离子进行离子微结构化。制备了长度为1 mm，厚度为10μm的平行线，以研究聚合物中纳米颗粒的存在对所形成的微结构的表面形态的影响。通过光学显微镜检查所产生的微结构。红外（IR）光谱法用于研究离子类型和能量密度对材料化学变化的影响。原子力显微镜用于精细研究以及检查微观结构质量。分析显示，与纯PDMS相比，纳米复合材料的抗辐射性增强。收缩率与注量成正比，但是两种材料的最大值都受饱和度的限制。在与纯PDMS相同的辐照条件下获得的改良PDMS中的3D微观结构的特征是其较小的高度。由于收缩的饱和和/或辐射诱发的材料加热，无法通过增加注量来获得与纯PDMS相同高度的纳米复合材料的微观结构。