In this work, the effects of the methane gas flow and the internal oscillating electric field between electrodes on radio-frequency (RF) atmospheric pressure argon/methane plasma jet and process of diamond-like carbon (DLC) film deposition have been investigated. Properties of RF atmospheric Ar/methane plasma jet such as active species density, length, electron temperature, appearance and ionization process of argon/methane plasma jet are changed due to the changing of methane flow content and electric field vector and its gradient. With increasing methane flow, the formation of C 2 hydrocarbon and CH band content is decreased because injected electrical energy to a mixture of Ar/methane gases is insufficient to stabilize the ionization process of methane gas and the electrical-chemical reaction rate is decreased. With shortening the gas gap between two electrodes, electric field strength and its gradient are increased leading to more energy injection to the electron. ...

中文翻译：

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甲烷含量和电极之间的振荡电场对大气Ar /甲烷等离子体射流和DLC涂层沉积的影响

在这项工作中，研究了甲烷气流和电极之间的内部振荡电场对射频（RF）大气压氩/甲烷等离子体射流以及类金刚石碳（DLC）膜沉积过程的影响。由于甲烷流量，电场矢量及其梯度的变化，改变了射频大气氩/甲烷等离子体射流的性质，如活性物种密度，长度，电子温度，氩气/甲烷等离子体射流的外观和电离过程。随着甲烷流量的增加，由于注入到Ar /甲烷气体混合物中的电能不足以稳定甲烷气体的电离过程，并且电化学反应速率降低，C 2烃的形成和CH带含量减少。随着两个电极之间的气隙的缩短，电场强度及其梯度增加，导致更多的能量注入电子。...