A new self-calibration method for a precision two-dimensional (2D) stage is proposed, which can be applied effectively to on-machine condition. Using a sensor measuring absolute position of a 2D reference scale in the X-, Y-, and Θ-axis, we align the scale in three views efficiently, which are required to obtain an exact solution for a 2D error function of the stage, and higher flexibility is achieved since a sample site interval can be assigned without limitation. The feasibility and performance of the proposed method were evaluated experimentally. Error functions of the 2D stage were obtained at 9 × 9 sample sites with repeatability of 43 nm and 22 nm, when the sample site intervals were 10 mm and 0.1 mm, respectively. Two error functions of the reference scale, obtained using the readouts of the 2D stage or a laser interferometer, coincided within 89 nm and 15 nm for each sample interval.

提出了一种用于二维二维平台的新的自校准方法，该方法可以有效地应用于机载条件。使用传感器测量2D参考标尺在X，Y和Θ轴上的绝对位置，我们可以在三个视图中有效地对齐标尺，这是获得平台2D误差函数的精确解所必需的，由于可以不受限制地分配采样位点间隔，因此可以实现更高的灵活性。实验评估了该方法的可行性和性能。当样本位置间隔分别为10 mm和0.1 mm时，在9×9个样本位置获得2D平台的误差函数，重复性分别为43 nm和22 nm。使用2D平台或激光干涉仪的读数获得的参考刻度的两个误差函数，