Microelectromechanical systems and integrated photonics provide the basis for many reliable and compact circuit elements in modern communication systems. Electro-opto-mechanical devices are currently one of the leading approaches to realize ultra-sensitive, low-loss transducers for an emerging quantum information technology. Here we present an on-chip microwave frequency converter based on a planar aluminum on silicon nitride platform that is compatible with slot-mode coupled photonic crystal cavities. We show efficient frequency conversion between two propagating microwave modes mediated by the radiation pressure interaction with a metalized dielectric nanobeam oscillator. We achieve bidirectional coherent conversion with a total device efficiency of up to ∼60%, a dynamic range of 2 × 10 9 photons/s and an instantaneous bandwidth of up to 1.7 kHz. A high fidelity quantum state transfer would be possible if the drive dependent output noise of currently ∼14 photons s

中文翻译：

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由光子兼容的氮化硅纳米束振荡器介导的高效微波频率转换

微机电系统和集成的光子学为现代通信系统中的许多可靠和紧凑的电路元件提供了基础。当前，光电设备是为新兴的量子信息技术实现超灵敏，低损耗换能器的领先方法之一。在这里，我们介绍一种基于片状氮化硅平台上的铝的片上微波变频器，该变频器与缝隙模式耦合光子晶体腔兼容。我们展示了通过与金属化介电纳米束振荡器的辐射压力相互作用介导的两个传播微波模式之间的有效频率转换。我们实现了双向相干转换，总器件效率高达60％，动态范围为2×10 9光子/秒，瞬时带宽高达1.7 kHz。