In this paper, the etching position of a target was predicted using magnetic field simulation. The magnetic field distribution was simulated with the finite element analysis method, the distributio...

中文翻译：

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用垂直磁场预测中频溅射阴极腐蚀位置

在本文中，使用磁场模拟来预测目标的蚀刻位置。磁场分布采用有限元分析方法进行模拟，分布...