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Raman and ultraviolet–visible spectroscopy of titanium chromium nitride thin films
Surface Engineering ( IF 2.4 ) Pub Date : 2020-04-07 , DOI: 10.1080/02670844.2020.1746493 Abbas Kosari Mehr 1 , Reza Babaei 1 , Ali Kosari Mehr 2 , Mohammad Reza Zamani Meymian 2
Surface Engineering ( IF 2.4 ) Pub Date : 2020-04-07 , DOI: 10.1080/02670844.2020.1746493 Abbas Kosari Mehr 1 , Reza Babaei 1 , Ali Kosari Mehr 2 , Mohammad Reza Zamani Meymian 2
Affiliation
Titanium chromium nitride (TiCrN) films were prepared under various nitrogen flow rates (7–18 sccm) via co-sputtering. It was argued that the target poisoning effect governs the deposition process ...
中文翻译：
钛铬氮化物薄膜的拉曼光谱和紫外-可见光谱
通过共溅射在各种氮气流量（7-18 sccm）下制备氮化钛铬（TiCrN）薄膜。有人认为目标中毒效应控制着沉积过程......
更新日期：2020-04-07
中文翻译：
钛铬氮化物薄膜的拉曼光谱和紫外-可见光谱
通过共溅射在各种氮气流量（7-18 sccm）下制备氮化钛铬（TiCrN）薄膜。有人认为目标中毒效应控制着沉积过程......
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