Abstract Over the past decade, Air Squared has been actively developing and improving the highly anticipated 15 m3/h tritium vacuum pump to replace the obsolete industry standard Normetex scroll pump. The all-metal pump features a metal bellows that hermetically seals all tritium gas from any material other than metal. Air Squared has listened to the tritium market’s needs and is currently developing the latest addition to the Air Squared tritium vacuum pump line: the 150 m3/h liquid cooled all-metal (LCAM) scroll vacuum pump. Through numerous hours of testing, Air Squared has demonstrated the advantages of LCAM scroll vacuum pumps. The effect that thermal expansion has on highly toleranced all-metal pumps has been observed and characterized to predict pump performance as well as provide safe operational temperature limits. Performance characteristics of the 15 m3/h pump have been analyzed with different process gases to understand the effects of pumping light gases. Vacuum pumping speed curves have been generated at various interstage pressures to understand the advantages that roughing pump systems have when used in series with all-metal scroll vacuum pumps. This paper presents Air Squared’s 15 m3/h designs and highlights the performance characteristics. The effects that pump temperature, process gas, and fore-vacuum have on all-metal scroll vacuum pumps are explained with empirical data collected over a decade of research. With the knowledge and data collected, Air Squared has a pathway for a new industry standard 15 m3/h and 150 m3/h positive displacement scroll pump for tritium service to support international nuclear fusion and tritium research.

中文翻译：

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用于氚加工系统的全金属涡旋真空泵

摘要 在过去的十年中，Air Squared 一直在积极开发和改进备受期待的 15 m3/h 氚真空泵，以取代过时的行业标准 Normetex 涡旋泵。全金属泵具有金属波纹管，可将所有氚气与金属以外的任何材料密封。Air Squared 倾听氚市场的需求，目前正在开发 Air Squared 氚真空泵系列的最新产品：150 m3/h 液冷全金属 (LCAM) 涡旋真空泵。通过数小时的测试，Air Squared 展示了 LCAM 涡旋真空泵的优势。已观察到热膨胀对高耐受全金属泵的影响并对其进行表征，以预测泵的性能并提供安全的操作温度限制。使用不同的工艺气体分析了 15 m3/h 泵的性能特征，以了解泵送轻质气体的影响。已在各种级间压力下生成真空抽速曲线，以了解低真空泵系统与全金属涡旋真空泵串联使用时的优势。本文介绍了 Air Squared 的 15 m3/h 设计并重点介绍了性能特点。泵温度、工艺气体和前级真空对全金属涡旋真空泵的影响通过十多年研究收集的经验数据进行了解释。通过收集到的知识和数据，Air Squared 为氚服务制定了新的行业标准 15 m3/h 和 150 m3/h 正排量涡旋泵，以支持国际核聚变和氚研究。