Abstract

Wide-range measurements of thin films of SiC_xO_yH_z organosilicate glasses, both dense and porous, deposited on dielectric sapphire substrates and conductive layers of platinum and aluminum, were performed in the THz–IR (5–5000 cm^–1) range. This method can be used not only to analyze the evolution of absorption bands in amorphous dielectric films but also to evaluate static conductivity in the framework of the Drude model of conductive layers and to determine the electrodynamic characteristics of organosilicate films with low dielectric permittivity. The original approach proposes a comprehensive analysis of experimental broadband data in order to determine not only the parameters of the individual bands of lattice and molecular vibrations but also the integrated electrodynamic characteristics of the samples obtained.

中文翻译：

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致密和多孔有机硅玻璃薄膜的太赫兹和红外光谱

摘要

在THz–IR（5–5000 cm ^–1）下对沉积在介电蓝宝石衬底以及铂和铝导电层上的SiC _x O _y H _z有机硅酸盐玻璃薄膜进行了宽范围的测量，包括致密和多孔的） 范围。该方法不仅可以用于分析非晶态介电膜中吸收带的演变，而且可以在导电层的Drude模型框架内评估静态电导率，并确定具有低介电常数的有机硅酸盐薄膜的电动力学特性。最初的方法提出了对实验宽带数据的综合分析，以便不仅确定晶格和分子振动各个频带的参数，而且确定所获得样品的综合电动力学特征。