Scanning electron microscopy, coupled with energy-dispersive X-ray spectroscopy (EDS), is a powerful tool used in many scientific fields. It can provide nanoscale images, allowing size and morphology measurements, as well as provide information on the spatial distribution of elements in a sample. This study compares the capabilities of a traditional EDS detector with a recently developed annular EDS detector when analyzing electron transparent and beam-sensitive NaCl particles on a TEM grid. The optimal settings for single particle analysis are identified in order to minimize beam damage and optimize sample throughput via the choice of acceleration voltage, EDS acquisition time, and quantification model. Here, a linear combination of two models is used to bridge results for particle sizes, which are neither bulk nor sufficiently thin to assume electron transparent. Additionally, we show that the increased count rate obtainable with the annular detector enables mapping as a viable analysis strategy compared with feature detection methods, which only scan segmented regions. Finally, we discuss advantages and disadvantages of the two analysis strategies.

中文翻译：

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使用扫描电子显微镜结合能量色散 X 射线光谱分析电子透明束敏感样品

扫描电子显微镜与能量色散 X 射线光谱 (EDS) 相结合，是许多科学领域中使用的强大工具。它可以提供纳米级图像，允许进行尺寸和形态测量，并提供有关样品中元素空间分布的信息。本研究比较了传统 EDS 检测器与最近开发的环形 EDS 检测器在 TEM 网格上分析电子透明和光束敏感的 NaCl 颗粒时的能力。通过选择加速电压、EDS 采集时间和量化模型，确定了单粒子分析的最佳设置，以最大限度地减少光束损坏并优化样品通量。在这里，两个模型的线性组合用于桥接粒径的结果，它们既不是体积也不是足够薄以假设电子透明。此外，我们表明，与仅扫描分段区域的特征检测方法相比，环形检测器可获得的增加的计数率使映射成为一种可行的分析策略。最后，我们讨论了两种分析策略的优缺点。