Objective. Recording electrical activity from individual cells in vivo is a key technology for basic neuroscience and has growing clinical applications. To maximize the number of independent recording channels as well as the longevity, and quality of these recordings, researchers often turn to small and flexible electrodes that minimize tissue damage and can isolate signals from individual neurons. One challenge when creating these small electrodes, however, is to maintain a low interfacial impedance by applying a surface coating that is stable in tissue and does not significantly complicate the fabrication process. Approach. Here we use a high-pressure Pt sputtering process to create low-impedance electrodes at the wafer scale using standard microfabrication equipment. Main results. We find that direct-sputtered Pt provides a reliable and well-controlled porous coating that reduces the electrode impedance by 5–9 fold compared to flat Pt and is compa...

中文翻译：

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溅射多孔Pt，用于晶片级制造低阻抗柔性微电极。

目的。记录体内单个细胞的电活动是基础神经科学的一项关键技术，并且在临床上正在不断发展。为了最大化独立记录通道的数量以及这些记录的寿命和质量，研究人员经常求助于小而柔软的电极，以最大程度地减少组织损伤并可以从单个神经元中分离出信号。然而，当制造这些小电极时的一个挑战是通过施加在组织中稳定并且不会使制造过程显着复杂化的表面涂层来维持低的界面阻抗。方法。在这里，我们使用高压Pt溅射工艺，使用标准的微加工设备在晶圆级上创建低阻抗电极。主要结果。