Abstract Modern industrial production requires fast and automated quality control using state-of-the-art surface metrology sensors embedded in fast high-precision measuring machines. In order to achieve both fast and precise positioning, active control systems with model-based compensation of dynamic positioning errors due to increased acceleration forces can be applied. However, these active control systems require an accurate estimate of the dynamic positioning errors of the tool-center-point (TCP) with respect to the precisely measured position of the drive axes. A novel optical camera sensor system with high subpixel precision based on multi-spot detection enables the direct measurement of the TCP position at a slower rate than the sampling time of the control system and with significant latency or dead-time. Based on a general yet simple deviation model with large model mismatch, three approaches to estimate the TCP position are presented and compared with simulation and test bench results of a modified Mahr MFU 100 measuring machine. First, a multi-rate Kalman filter with delay compensation is designed based on a simple physical modal model generalizing the applicability of the concept for different types of measuring machines and machine tools. Second, additional sensors in form of accelerometers placed at the TCP are used to obtain an indirect measurement of the TCP position at a fast sampling rate to reduce the effect of the model mismatch. Third, instead of additional sensors, an alternative concept consisting of enhanced Gaussian process modeling to improve the model accuracy with a data-based error model is incorporated in the Kalman filter framework in form of fast pseudo-measurements outperforming the other approaches.

中文翻译：

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估计坐标测量机的动态定位误差

摘要 现代工业生产需要使用嵌入在快速高精度测量机中的最先进的表面计量传感器进行快速和自动化的质量控制。为了实现快速和精确的定位，可以应用主动控制系统，该系统具有基于模型的动态定位误差补偿，因为加速力增加。然而，这些主动控制系统需要准确估计工具中心点 (TCP) 相对于驱动轴精确测量位置的动态定位误差。基于多点检测的具有高亚像素精度的新型光学相机传感器系统能够以比控制系统的采样时间更慢的速率和显着的延迟或死区时间来直接测量 TCP 位置。基于具有大模型失配的通用但简单的偏差模型，提出了三种估计 TCP 位置的方法，并与改进的 Mahr MFU 100 测量机的仿真和测试台结果进行了比较。首先，基于简单的物理模态模型设计了具有延迟补偿的多速率卡尔曼滤波器，该模型概括了该概念对不同类型测量机和机床的适用性。其次，放置在 TCP 处的加速度计形式的附加传感器用于以快速采样率获得 TCP 位置的间接测量，以减少模型不匹配的影响。第三，代替额外的传感器，