The performance of micro/nanoelectromechanical systems (MEMS/NEMS) relies on efficient lubrication. In the present work, new sulfur-based organic salts were tested as additives in a polyethylene glycol to lubricate silicon surfaces used in the manufacture of MEMS/NEMS. Seven salts were tested: 1-butylsulfonic-3-methylimidazolium triflate [(C₄SO₃H)MIM][TfO], thiamine triflate [Thiamine][TfO]₂, 1-ethyl-3-methylimidazolium camphorsulfonate [C₂MIM][CSA] [isomers (R) and (S)], 1,3-dimethylpiridinium methylsulfate [C₁-3pic][MeSO₄], methylimidazolium methanesulfonate [HMIM][MeSO₃], and tetramethylguanidine methanesulfonate [TMG][MeSO₃]. A nanotribometer was used to determine the friction coefficients using steel spheres as counter bodies. Excellent tribological properties were achieved with the additives containing the anions [MeSO₄]⁻ and [MeSO₃]⁻. The films formed on the Si substrates were studied by FTIR, ellipsometry and AFM. A mixed lubrication mechanism was proposed where additive adsorption avoids contact between sliding surfaces.

Graphical Abstract

Sulfur-based organic salts as additives in the base oil PEG200 significantly improve the lubrication of silicon surfaces used in MEMS/NEMS

中文翻译：

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使用离子液体作为机油添加剂改善硅表面的润滑：基于硫的官能团的作用

微/纳米机电系统（MEMS / NEMS）的性能取决于有效的润滑。在目前的工作中，新的硫基有机盐作为添加剂在聚乙二醇中进行了测试，以润滑用于制造MEMS / NEMS的硅表面。七对盐进行了测试：1-butylsulfonic -3-甲基咪唑鎓三氟甲磺酸盐[（C ₄ SO ₃ 1H）MIM] [TFO]，硫胺素三氟甲磺酸酯[硫胺] [TFO] ₂，1-乙基-3-甲基咪唑鎓樟脑磺酸盐[C ₂ MIM] [CSA] [异构体（R）和（S）]，1,3-二甲基甲基吡啶鎓甲基硫酸盐[C ₁ -3pic] [MeSO ₄ ]，甲基咪唑鎓甲磺酸盐[HMIM] [MeSO ₃ ]和四甲基胍甲磺酸盐[TMG] [MeSO ₃]。使用纳米摩擦计，以钢球为对立体来确定摩擦系数。含有阴离子[MeSO ₄ ] ^-和[MeSO ₃ ] ^-的添加剂获得了优异的摩擦学性能。通过FTIR，椭偏仪和原子力显微镜研究了在硅衬底上形成的薄膜。提出了一种混合润滑机制，其中添加剂吸附可避免滑动表面之间的接触。

图形概要

硫基有机盐作为基础油PEG200中的添加剂可显着改善MEMS / NEMS中使用的硅表面的润滑性