Dislocations are major structural defects in semiconductor materials, and they have negative impacts on the performance and reliability of electronic devices. The Burgers vector ( b → ) of a dislocation is one of the most important characteristics that determines its behavior in an operating device. In this study, we used synchrotron x-ray topography (XRT) to perform systematic observations of dislocations in β-Ga2O3, which is a promising wide-bandgap semiconductor for power device applications. By applying the g → ⋅ b → invisibility criterion to dislocation contrasts in XRTs taken at multiple reciprocal lattice vectors g →, we identified 12 types of Burgers vectors, including 11 types theoretically predicted by Yamaguchi et al. [Superlattice Microst. 99, 99 (2016)] and b → = ⟨ 100 ⟩. Some of these Burgers vectors, such as b → = ⟨ 10 1 ¯ ⟩ , 1 2 ⟨ 132 ⟩ , 1 2 ⟨ 1 3 ¯ 2 ⟩ , ⟨ 001 ⟩, and ⟨ 100 ⟩, were confirmed experimentally for the first time.

中文翻译：

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通过同步加速器 X 射线地形图识别单斜晶系 β-Ga2O3 中位错的 Burgers 矢量

位错是半导体材料的主要结构缺陷，对电子器件的性能和可靠性产生负面影响。位错的 Burgers 矢量 ( b → ) 是决定其在操作设备中的行为的最重要特征之一。在这项研究中，我们使用同步加速器 X 射线形貌 (XRT) 对 β-Ga2O3 中的位错进行系统观察，β-Ga2O3 是一种用于功率器件应用的有前途的宽带隙半导体。通过将 g → ⋅ b → 不可见性标准应用于在多个互易晶格向量 g → 处获取的 XRT 中的位错对比，我们确定了 12 种 Burgers 向量，其中包括 Yamaguchi 等人理论预测的 11 种类型。[超晶格微观。99, 99 (2016)] 和 b → = ⟨ 100 ⟩。其中一些 Burgers 向量，例如 b → = ⟨ 10 1 ¯ ⟩ ，