Micromachining in the micro-electric discharge machining (μ-EDM) process requires high material-removal rate with good surface quality. Power-mixed μ-EDM, a modified machining process by introducing specific powder into the dielectric fluid, is among the key inventions to achieving these requirements. This article presents a review of the implementation of powder-mixed micro-EDM processes for microfabrication. Special attention was given to the influence of the powder characteristics, such as the concentration, electrical conductivity, shape and size of the powder. Subsequently, when describing the use of powder for obtaining a high material-removal rate and surface quality, other major applications in μ-EDM for surface modification and geometrical accuracy were also discussed. Finally, some of the varied methods that are used in powder-mixed μ-EDM and industrialization challenges are extensively elaborated.

中文翻译：

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粉末混合微放电加工中的微加工

微放电加工（μ-EDM）工艺中的微加工要求高材料去除率和良好的表面质量。动力混合型μ-EDM是一种通过将特定粉末引入介电液的改进加工工艺，是实现这些要求的关键发明之一。本文介绍了用于微细加工的粉末混合微型EDM工艺的实施情况。特别注意粉末特性的影响，例如粉末的浓度，电导率，形状和尺寸。随后，当描述使用粉末获得高材料去除率和表面质量时，还讨论了μ-EDM在表面改性和几何精度方面的其他主要应用。最后，