Abstract Polycrystalline NiPd and Ni5Pd alloys were irradiated with argon gas cluster ion beam and atomic ion beam. In situ XPS measurements showed surface enrichment with Ni. For cluster ions, the degree of the enrichment was significantly higher, and the ion current density influenced on it. Under oblique cluster ion beam, ripples developed on the surface, and the elements of the alloy redistributed along the surface according to the ripple pattern. For normal cluster ion beam direction, sputtering rate was determined by a crystalline orientation, which limited the smoothing effect.

中文翻译：

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NiPd合金在斜向和正常气体团簇离子束辐照下的表面形貌和成分

摘要 用氩气团簇离子束和原子离子束辐照多晶NiPd和Ni5Pd合金。原位 XPS 测量显示表面富含 Ni。对于团簇离子，富集程度明显较高，离子流密度对其有影响。在倾斜的团簇离子束作用下，表面产生波纹，合金元素按照波纹图案沿表面重新分布。对于正常的团簇离子束方向，溅射速率由晶体取向决定，这限制了平滑效果。