This paper presents the design and simulation of a MEMS pressure sensor with a digital output for measuring pressure in the range of 0–1 bar. The sensor uses the diaphragm deflection and a simple mechanical structure to convert the applied pressure to a logic digital output. Three different designs of the sensor have been proposed with square and circular diaphragms. The first design uses ten different sized square diaphragms on the same substrate to get a resolution of 0.1 bar. The second design uses a single square diaphragm instead of ten to get the same resolution. The third design also uses a single circular diaphragm with a central boss structure, which reduces the deflection nonlinearity at low pressures. Analytical analysis was carried out for all the diaphragm deflections, and the results are supported by numerical simulations carried out in COMSOL Multiphysics tool. The proposed sensor can operate on 5 V which suits well with conventional CMOS logic. The direct digital output from the pressure sensor makes its useful in wide variety of applications.

中文翻译：

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数字输出MEMS压力传感器的设计与仿真

本文介绍了具有数字输出的MEMS压力传感器的设计和仿真，该数字输出用于测量0–1 bar范围内的压力。该传感器利用膜片挠度和简单的机械结构将施加的压力转换为逻辑数字输出。已经提出了具有方形和圆形膜片的传感器的三种不同设计。第一种设计在同一基板上使用十个不同尺寸的方形隔膜，以获得0.1 bar的分辨率。第二种设计使用单个正方形光圈而不是十个来获得相同的分辨率。第三种设计还使用具有中央凸台结构的单个圆形隔膜，从而减少了低压下的挠曲非线性。对所有膜片挠度进行了分析，并且结果由COMSOL Multiphysics工具中进行的数值模拟来支持。拟议的传感器可以在5 V电压下运行，非常适合常规CMOS逻辑。压力传感器的直接数字输出使其可用于多种应用。