Abstract The influence of reverse proton exchange (RPE) and some types of surface pretreatment (exposure to Piranha or RCA-1 solutions or to HNO3+HF mixture) on the structure and properties of proton-exchanged layers has been studied in X-cut lithium niobate (LN). It has been shown that the rate of phase transitions in PE layers during RPE is greater than that during annealing at the same temperature. Pretreatment of LN surface before PE by Piranha or RCA-1 solutions slightly increases refractive index change Δne in the resulting waveguide, whereas pretreatment by HNO3+HF mixture decreases it.

中文翻译：

---

表面处理对铌酸锂质子交换波导结构和性能的影响

摘要 在 X-cut 锂中研究了反向质子交换 (RPE) 和某些类型的表面预处理（暴露于食人鱼或 RCA-1 溶液或 HNO3+HF 混合物）对质子交换层的结构和性能的影响。铌酸盐 (LN)。已经表明，在相同温度下，RPE 过程中 PE 层中的相变速率大于退火过程中的相变速率。在 PE 之前用 Piranha 或 RCA-1 溶液预处理 LN 表面会略微增加所得波导中的折射率变化 Δne，而用 HNO3+HF 混合物进行预处理会降低它。