We present a shape design optimization method for interdigitated electrodes in an electro-adhesive device. In the finite element analysis of electrostatics using linear basis functions, a finite node displacement method is used for the accurate electro-adhesive force by integrating the electric field along the boundary surface. The floating potential boundary for conductive objects is handled by a charge conservation law in the electrostatic analysis as well as the shape design sensitivity analysis. In numerical examples, the structural shape of interdigitated electrodes is optimized to maximize the electro-adhesion force per unit area for both conductive and non-conductive objects. It turns out that the electro-adhesive force is mainly induced by an electrostatic induction for conductive objects and by an electric polarization for non-conductive ones. There is an optimal ratio of electrode width and air gap thickness for non-conductive objects but no limit for conductive objects.

我们提出了一种用于电粘附装置中的叉指电极的形状设计优化方法。在使用线性基函数的静电的有限元分析中，使用有限节点位移法通过沿边界表面积分电场来获得精确的电粘附力。导电物体的浮动电位边界在静电分析以及形状设计灵敏度分析中通过电荷守恒定律进行处理。在数值示例中，叉指电极的结构形状被优化以最大化导电和非导电物体的每单位面积的电粘附力。事实证明，电粘附力主要是由导电物体的静电感应和非导电物体的极化引起的。非导电物体的电极宽度和气隙厚度的最佳比例，但对导电物体没有限制。