Nickel-based single-crystal superalloy has no grain boundary. This makes the traditional cutting mechanism of shearing and slipping along grain boundary of polycrystalline material based on the theory of elastic–plastic deformation not suitable for drilling single-crystal parts. To achieve high-quality and low-damage micro-drilling of nickel-based single-crystal superalloy, the micro-drilling surface/subsurface quality of the (001) crystal plane of nickel-based single-crystal superalloy was studied in this paper. Firstly, the influence rules of the cutting speed (v_s) and the feed rate (v_w) on the micro-drilling hole size, surface morphology, surface roughness and subsurface damage depth were studied. Then, the micro-hardness on micro-drilling subsurface was analyzed. Finally, the subsurface recrystallization was explored. The results show that with the increase in v_s, the hole diameter error and the surface roughness decrease, and the depth of subsurface plastic deformation layer decreases first and then increases; with the increase in v_w, the error of hole diameter and the surface roughness increase, and the depth of the deformation layer decreases first and then increases. When v_w > 0.33 μm/r, there are severe scratches on the surface of the hole wall, and the hole wall appears undulating stripes; white layer structure and severe plastic deformation layer appeared on the micro-drilling subsurface; the γ and γ’ phases' deformation is severe; the micro-hardness at the subsurface white layer is small, and the micro-hardness value at the plastic deformation zone is large; after the high-temperature treatment, γ phase dissolves on the subsurface of micro-drilling parts, and the cellular recrystallization and the complete recrystallization occur. The minimum thickness of recrystallization layer obtained is 1.43 μm at v_s = 141 m/min and v_w = 0.105 μm/r. This study provides a good guidance and reference for the machining of nickel-based single-crystal superalloy micro-hole parts.

镍基单晶高温合金没有晶界。这使得基于弹塑性变形理论的沿多晶材料的晶界剪切和滑移的传统切削机理不适合于单晶零件的钻孔。为了实现高质量，低损伤的镍基单晶高温合金微孔加工，本文研究了镍基单晶高温合金（001）晶面的微孔表面/亚表面质量。首先，切削速度（v _s）和进给速度（v _w）的影响规律）在微孔尺寸，表面形态，表面粗糙度和地下破坏深度方面进行了研究。然后，分析了微钻孔地下的显微硬度。最后，探讨了地下再结晶。结果表明，随着v _s的增加，孔径误差和表面粗糙度减小，地下塑性变形层的深度先减小后增大；随着v _w的增加，孔径和表面粗糙度的误差增加，变形层的深度先减小然后增大。当v _w > 0.33μm/ r，孔壁表面有严重划痕，孔壁上出现起伏的条纹；微孔地下存在白色层结构和严重的塑性变形层。的γ和γ “相”变形严重; 地下白层的显微硬度小，塑性变形区的显微硬度大。高温处理后，γ相溶解在微钻孔部件的表面，并发生细胞重结晶和完全重结晶。在v _s  = 141 m / min和v _w时，获得的重结晶层的最小厚度为1.43μm = 0.105μm/ r。该研究为镍基单晶高温合金微孔零件的加工提供了很好的指导和参考。