Traceability of digital sensors is a metrological challenge, as well as a present priority, as stated within the emerging metrology requirements for the future in the Strategy 2017 to 2027 document of the Consultative Committee for Acoustics, Ultrasound, and Vibration of BIPM. From this perspective, in this paper, a calibration system for 3-axis digital MEMS accelerometers is described, in order to simultaneously evaluate the main and transverse sensitivities in the frequency domain (from 5 Hz up to 3 kHz) and in static conditions, together with a proper sensitivity parameter for digital outputs, thus providing the required metrological traceability. The procedure, based on the comparison to a reference transducer, involves a single-axis excitation of inclined planes. Experimental results are expressed in terms of exploitation and sensitivities matrices. Overall expanded uncertainties of the main terms are in the order of 2%, in dynamic conditions, and 1%–2% in static conditions...

中文翻译：

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数字3轴MEMS加速度计的可追溯性：同时确定频域中的主灵敏度和横向灵敏度

BIBI声学，超声和振动咨询委员会的《 2017至2027年战略》文件对未来的新兴计量要求中指出，数字传感器的可追溯性是一项计量挑战，也是当前的重点。从这个角度出发，本文介绍了一种用于三轴数字MEMS加速度计的校准系统，以便同时评估频域（从5 Hz到3 kHz）和静态条件下的主灵敏度和横向灵敏度。具有适合数字量输出的灵敏度参数，从而提供了所需的计量可追溯性。基于与参考换能器的比较，该过程涉及倾斜平面的单轴激励。实验结果以利用程度和敏感性矩阵表示。在动态条件下，主要术语的总体不确定性约为2％，而在静态条件下则为1％–2％。